Surface Analysis of Etched Silicon
نویسندگان
چکیده
منابع مشابه
Surface Reconstruction of Etched Contours
Previously, a computationally efficient and geometrically accurate etching simulation was developed to compute contours of constant depth at different time steps [1]. Experimental verification of this early work has been established [2]. However, contours are not amenable to the analysis and design of microsystems, since it is often necessary to determine object interaction and mechanics in whi...
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ژورنال
عنوان ژورنال: Journal of Surface Engineered Materials and Advanced Technology
سال: 2014
ISSN: 2161-4881,2161-489X
DOI: 10.4236/jsemat.2014.42013